英语语法分析

In order to describe the characteristics of piezoelectric bimorph, properties of PZT film are studied by SEM and XRD.

为了更好地研究双晶片的特性，利用扫描电镜(sem)和x -射线衍射(XRD)技术，对PZT薄膜的特性进行了较为详细的研究。

In this dissertation, only the piezoelectric bimorph micro-actuator and valveless piezoelectric micro pump are introduced.

本文的研究重点是压电双晶梁微驱动器和无阀压电微泵。

A new type of the PZT driving device to realize the planar movement by using the bimorph oscillator as the driver was presented.

采用双压电晶片振子为移动机构的驱动源，提出可以实现二维平面移动的新型压电驱动机构。