Batch microassembly of MEMS sensors is limited by the manual manipulation required specially trained technicians.
手工操作限制了MEMS传感器的批量生产。
Automatic microassembly system is the key equipment to realize the assembly of miniature function device and interface device.
自动微装配系统是实现微型功能器件、接口器件与微流控芯片装配的关键设备。
Moreover research experiments about the microassembly of capillary and microfluidic chip were done, which have proved that the assembly assignment can be finished successfully.