英语语法分析

Mechanism, characteristic and application of excimer laser micromachining are introduced.

介绍了准分子激光微加工的机理、特点和应用。

Handbook of Micro lithography, Micromachining, and Micro fabrication. Vol.1: microlithography.

微平版印术，显微机械加工，和微制作手册：卷一：微平版印术。

Using micromachining technology, we also integrated micro-heater and temperature sensor on the chip.

利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。