英语语法分析

The rate of N atom diffusion is the key factor of controlling whole nitridation rate.

原子的扩散传质速率是控制总反应速率的关键因素。

These are consistent with the fact that nitridation induces a high oxide charge density.

这个结果和氮化会导致高密度氧化层电荷的事实相一致。

With the aid of in situ monitoring tool, we have investigated the effects of substrate nitridation.

以在位监测为辅助工具，研究了蓝宝石衬底氮化的影响。