英语语法分析

The existing problems of gas data of synthesis furnace exit of trichlorosilane were analysed.

分析了三氯氢硅合成炉出口反应气体组分数据存在的问题。

The method of tail gas harness of trichlorosilane synthesis furnace were introduced and compared.

介绍了治理三氯氢硅合成炉尾气的方法，并进行了比较。

The method of tail gas harness of trichlorosilane synthesis furnace were introduced and compared.

前言：介绍了治理三氯氢硅合成炉尾气的方法，并进行了比较。